10 kPa
On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPXM2010 device is a silicon piezoresistive pressure sensors providing a highly
accurate and linear voltage output -- directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thinfilm
resistor network integrated onchip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Features
Temperature Compensated Over 0
C to +85
C
Available in EasytoUse Tape & Reel
Ratiometric to Supply Voltage
Gauge Ported & Non Ported Options
Application Examples
Respiratory Diagnostics
Air Movement Control
Controllers
Pressure Switching
Figure 1 shows a block diagram of the internal circuitry on the standalone pressure
sensor chip.
Figure 1. Temperature Compensated Pressure Sensor Schematic
V
S
3
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2
4
V
out+
V
out-
1
GND
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
Order this document
by MPXM2010/D
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Motorola, Inc. 2002
MPXM2010
SERIES
0 to 10 kPa (0 to 1.45 psi)
25 mV FULL SCALE SPAN
(TYPICAL)
PIN NUMBER
1
2
Gnd
+V
out
3
4
V
S
V
out
Motorola Preferred Device
MPXM2010D/DT1
CASE 1320
MPXM2010GS/GST1
CASE 1320A
SCALE 1:1
SCALE 1:1
MPAK PACKAGE
REV 1
MPXM2010 SERIES
2
Motorola Sensor Device Data
MAXIMUM RATINGS
(NOTE)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
P
max
75
kPa
Storage Temperature
T
stg
40 to +125
C
Operating Temperature
T
A
40 to +125
C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS
(V
S
= 10 Vdc, T
A
= 25
C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
Pressure Range
(1)
P
OP
0
--
10
kPa
Supply Voltage
(2)
V
S
--
10
16
Vdc
Supply Current
I
o
--
6.0
--
mAdc
Full Scale Span
(3)
V
FSS
24
25
26
mV
Offset
(4)
V
off
1.0
--
1.0
mV
Sensitivity
V/
P
--
2.5
--
mV/kPa
Linearity
(5)
--
1.0
--
1.0
%V
FSS
Pressure Hysteresis
(5)
(0 to 10 kPa)
--
--
0.1
--
%V
FSS
Temperature Hysteresis
(5)
(40
C to +125
C)
--
--
0.5
--
%V
FSS
Temperature Effect on Full Scale Span
(5)
TCV
FSS
1.0
--
1.0
%V
FSS
Temperature Effect on Offset
(5)
TCV
off
1.0
--
1.0
mV
Input Impedance
Z
in
1000
--
2550
Output Impedance
Z
out
1400
--
3000
Response Time
(6)
(10% to 90%)
t
R
--
1.0
--
ms
WarmUp
--
--
20
--
ms
Offset Stability
(7)
--
--
0.5
--
%V
FSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device selfheating.
3. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25
C.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85
C, relative to 25
C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85
C, relative
to 25
C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXM2010 SERIES
3
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: V
out
= V
off
+ sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the "best case" linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the "worst case" error
(often more desirable in error budget calculations) and the cal-
culations are more straightforward for the user. Motorola's
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
Figure 2. Linearity Specification Comparison
LEAST
SQUARE
DEVIATION
RELA
TIVE VOL
T
AGE OUTPUT
PRESSURE (% FULLSCALE)
0
50
100
END POINT
STRAIGHT LINE FIT
EXAGGERATED
PERFORMANCE
CURVE
LEAST SQUARES FIT
STRAIGHT LINE
DEVIATION
OFFSET
ONCHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPXM2010 series at 25
C. The output
is directly proportional to the differential pressure and is es-
sentially a straight line.
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
Figure 3. Output versus Pressure Differential
MIN
TYP
OFFSET
(TYP)
30
20
15
10
5
OUTPUT
(mVdc)
25
0
-5
kPa
PSI
2.5
0.362
5
0.725
7.5
1.09
10
1.45
a
MAX
SPAN
RANGE
(TYP)
V
S
= 10 Vdc
T
A
= 25
C
P1 > P2
ORDERING INFORMATION
Device Type
Options
Case No
Device Type
Options
Case No.
MPXM2010D
Nonported
1320
MPXM2010DT1
Nonported, Tape and Reel
1320
MPXM2010GS
Ported
1320A
MPXM2010GST1
Ported, Tape and Reel
1320A
MPXM2010 SERIES
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
CASE 132002
ISSUE A
DIM
MIN
MAX
INCHES
A
.155
.165
A1
.002
.010
b
.014
.018
b1
.120
.130
D
.245
.255
E
.475
.485
e
e/2
L
.038
.048
E1
.325
.335
0
7
.025 BSC
.050 BSC
NOTES:
1. DIMENSIONS ARE IN INCHES.
2. INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M-1994.
3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD
FLASH OR PROTRUSION. MOLD FLASH OR
PROTRUSION SHALL NOT EXCEED .006" PER SIDE.
4. ALL VERTICAL SURFACES TO BE 5
MAXIMUM.
5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR PROTRUSION
SHALL BE .008 MAXIMUM.
b1
E
e/2
e
A
M
0.004
B
C
A
0.006
B
C
4X
b
2X
A
M
0.004
B
C
E1
A
C
0.004
DETAIL E
SEATING
PLANE
GAGE
PLANE
DETAIL E
L
A1
.014
B
D
A
PIN 1
PIN 4
STYLE 1:
PIN 1. GND
2. +Vout
3. Vs
4. -Vout
MPXM2010 SERIES
5
Motorola Sensor Device Data
CASE 1320A02
ISSUE O
DIM
MIN
MAX
INCHES
A
.377
.397
A1
.002
.010
b
.014
.018
b1
.120
.130
D
.245
.255
E
.475
.485
e
e/2
L
.013
.023
E1
.325
.335
0
7
.025 BSC
.050 BSC
NOTES:
1. DIMENSIONS ARE IN INCHES.
2. INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M-1994.
3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD
FLASH OR PROTRUSION. MOLD FLASH OR
PROTRUSION SHALL NOT EXCEED .006" PER SIDE.
4. ALL VERTICAL SURFACES TO BE 5
MAXIMUM.
5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR PROTRUSION
SHALL BE .008 MAXIMUM.
b1
E
e/2
e
A
M
0.004
B
C
A
0.006
B
C
4X
b
2X
A
M
0.004
B
C
E1
A
C
0.004
DETAIL E
SEATING
PLANE
GAGE
PLANE
DETAIL E
L
A1
.014
B
D
A
M
.283
.293
N
.363
.373
P
.107
.117
S
.192
.202
N
S
P
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